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1

High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets

Stefan Bruns, Michael Vergöhl, Oliver Werner, Till Wallendorf

Journal:

Thin Solid Films

Year:

2012

Language:

english

File:

PDF, 562 KB

english, 2012

2

Applications of HIPIMS metal oxides

Sittinger, V., Lenck, O., Vergöhl, M., Szyszka, B., Bräuer, G.

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 1.98 MB

english, 2013

3

In situ monitoring of optical coatings on architectural glass and comparison of the accuracy of the layer thickness attainable with ellipsometry and photometry

M. Vergöhl, N. Malkomes, T. Matthée, G. Bräuer, U. Richter, F.-W. Nickol, J. Bruch

Journal:

Thin Solid Films

Year:

2001

Language:

english

File:

PDF, 769 KB

english, 2001

4

Effect of deposition parameters on optical and mechanical properties of MF- and DC-sputtered Nb2O5 films

B Hunsche, M Vergöhl, H Neuhäuser, F Klose, B Szyszka, T Matthée

Journal:

Thin Solid Films

Year:

2001

Language:

english

File:

PDF, 447 KB

english, 2001

5

Ex situ and in situ spectroscopic ellipsometry of MF and DC-sputtered TiO2 and SiO2 films for process control

M. Vergöhl, N. Malkomes, T. Staedler, T. Matthée, U. Richter

Journal:

Thin Solid Films

Year:

1999

Language:

english

File:

PDF, 306 KB

english, 1999

6

Production of MF and DC-pulse sputtered anti-reflective/anti-static optical interference coatings using a large area in-line coater

V. Sittinger, A. Pflug, W. Werner, C. Rickers, M. Vergöhl, A. Kaiser, B. Szyszka

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 320 KB

english, 2006

7

Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration

Rademacher, Daniel, Zickenrott, Tobias, Vergöhl, Michael

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 1.42 MB

english, 2013

8

Comparison of abrasive tests for transparent optical coatings

Bruns, Stefan, Montzka, Sebastian, Reimann, Wilfried, Vergöhl, Michael

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 1.16 MB

english, 2013

9

Direct metallization of PMMA with aluminum films using HIPIMS

Bandorf, R., Waschke, S., Carreri, F.C., Vergöhl, M., Grundmeier, G., Bräuer, G.

Journal:

Surface and Coatings Technology

Year:

2015

Language:

english

File:

PDF, 1.69 MB

english, 2015

10

First Experimental Proof of Excitons and Landau States in In0.53Ga0.47As/InP Quantum Wells at Room Temperature

O. Jaschinski, M. Vergöhl, J. Schoenes, A. Schlachetzki, P. Bönsch

Journal:

physica status solidi (a)

Year:

1997

Language:

english

File:

PDF, 187 KB

english, 1997

11

In-situ Messung dünner Schichten auf Architekturglas. In-situ measurement of thin films on architectural glass

Michael Vergöhl

Journal:

Vakuum in Forschung und Praxis

Year:

2000

File:

PDF, 150 KB

2000

12

Properties of cosputtered SiO2–Ta2O5-mixtures

Christina Polenzky, Christoph Rickers, Michael Vergöhl

Journal:

Thin Solid Films

Year:

2009

Language:

english

File:

PDF, 682 KB

english, 2009

13

Magnetron sputtering – Milestones of 30 years

G. Bräuer, B. Szyszka, M. Vergöhl, R. Bandorf

Journal:

Year:

2010

Language:

english

File:

PDF, 1.04 MB

english, 2010

14

Spectrally selective reflecting thin-film filters for laser display technology

Christoph Rickers, Michael Vergöhl

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 361 KB

english, 2003

15

Coexistence of excitons and Landau states in In0.53Ga0.47As/InP quantum wells at room temperature

O. Jaschinski, J. Schoenes, M. Vergöhl, P. Bönsch, A. Schlachetzki

Journal:

Physica B: Condensed Matter

Year:

1998

Language:

english

File:

PDF, 154 KB

english, 1998

16

Smart Coatings for Intelligent Surfaces

G. Bräuer, R. Bandorf, S. Biehl, A. Dietz, H. Lüthje, M. Vergöhl

Journal:

Vakuum in Forschung und Praxis

Year:

2008

Language:

english

File:

PDF, 364 KB

english, 2008

17

HiPIMS - Technologie und Anwendungsfelder

Ralf Bandorf, Michael Vergöhl, Oliver Werner, Volker Sittinger, Günter Bräuer

Journal:

Vakuum in Forschung und Praxis

Year:

2009

File:

PDF, 453 KB

2009

18

Optisch dünne Schichten mit kontrollierten Eigenschaften durch plasmaunterstütztes Magnetronsputtern

Oliver Werner, Frank Neumann, Thomas Neubert, Michael Vergöhl

Journal:

Vakuum in Forschung und Praxis

Year:

2009

Language:

german

File:

PDF, 429 KB

german, 2009

19

Photocatalytic TiO2 films deposited by different methods : Characterization of activity and optical properties in a round robin experiment

Dr. Michael Vergöhl, Dr. Holger Althues, Dr. Peter Frach, Dr. Daniel Glöß, Tobias Graumann, Dr. Christof Hübner, Frank Neumann, Dr. Thomas Neubert, Dr. Gerhard Schottner, Dr. Do-Keun Song

Journal:

Vakuum in Forschung und Praxis

Year:

2011

Language:

english

File:

PDF, 372 KB

english, 2011

20

Characterization of 31 nonperiodic layers of alternate SiO2/Nb2O5 on glass for optical filters by SIMS, XRR, and ellipsometry

Kirsten I. Schiffmann, Michael Vergöhl

Journal:

Surface and Interface Analysis

Year:

2012

Language:

english

File:

PDF, 245 KB

english, 2012

21

Real time control of reactive magnetron-sputter deposited optical filters by in situ spectroscopic ellipsometry

M Vergöhl, N Malkomes, T Matthée, G Bräuer

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 190 KB

english, 2000

22

Design and Manufacture of Spectrally Selective Reflecting Coatings for the Use with Laser Display Projection Screens

Rickers, Christoph, Vergöhl, Michael, Klages, Claus-Peter

Journal:

Year:

2002

Language:

english

File:

PDF, 913 KB

english, 2002

23

Mixed oxide coatings for optics

Stenzel, Olaf, Wilbrandt, Steffen, Schürmann, Mark, Kaiser, Norbert, Ehlers, Henrik, Mende, Mathias, Ristau, Detlev, Bruns, Stefan, Vergöhl, Michael, Stolze, Markus

Journal:

Year:

2011

Language:

english

File:

PDF, 428 KB

english, 2011

24

In situ thickness determination of multilayered structures using single wavelength ellipsometry and reverse engineering

Rademacher, Daniel, Vergöhl, Michael, Richter, Uwe

Journal:

Year:

2011

Language:

english

File:

PDF, 944 KB

english, 2011

25

Physikalisch-chemische und mikrobiologische Wirkung gesputterter photokatalytischer Titanoxid-Schichten

Peter Frach, Daniel Glöß, Michael Vergöhl, Kerstin Hund-Rinke, Iris Trick

Journal:

Vakuum in Forschung und Praxis

Year:

2007

File:

PDF, 515 KB

2007

26

SPIE Proceedings [SPIE SPIE Astronomical Telescopes + Instrumentation - Amsterdam, Netherlands (Sunday 1 July 2012)] Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II - Towards ultra-precise optical interference filters on large area: computational and experimental optimization of the homogeneity of magnetron-sputtered precision optical coatings

Vergöhl, Michael, Navarro, Ramón, Cunningham, Colin R., Pflug, Andreas, Rademacher, Daniel, Prieto, Eric

Year:

2012

Language:

english

File:

PDF, 2.88 MB

english, 2012

27

SPIE Proceedings [SPIE SPIE Optical Systems Design - Marseille, France (Monday 5 September 2011)] Advances in Optical Thin Films IV - Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques

Stenzel, Olaf, Schürmann, Mark, Wilbrandt, Steffen, Kaiser, Norbert, Tünnermann, Andreas, Mende, Mathias, Ehlers, Henrik, Ristau, Detlev, Bruns, Stefan, Vergöhl, Michael, Riggers, Werner, Bischoff, Ma

Year:

2011

Language:

english

File:

PDF, 287 KB

english, 2011

28

SPIE Proceedings [SPIE Optical Systems Design - Glasgow, Scotland, United Kingdom (Monday 1 September 2008)] Advances in Optical Thin Films III - New developments in magnetron sputter processes for precision optics

Vergöhl, Michael, Werner, Oliver, Bruns, Stefan, Kaiser, Norbert, Lequime, Michel, Macleod, H. Angus

Year:

2008

Language:

english

File:

PDF, 429 KB

english, 2008

29

Progress on optical coatings deposited with dual rotatable magnetrons in a sputter up system

Vergöhl, Michael, Rademacher, Daniel, Pflug, Andreas

Journal:

Surface and Coatings Technology

Year:

2014

Language:

english

File:

PDF, 1.07 MB

english, 2014

30

Numerical optimization of baffles for sputtering optical precision filters

Pflug, Andreas, Siemers, Michael, Melzig, Thomas, Rademacher, Daniel, Zickenrott, Tobias, Vergöhl, Michael

Journal:

Surface and Coatings Technology

Year:

2014

Language:

english

File:

PDF, 933 KB

english, 2014

31

Properties of reactive sputtered alumina–silica mixtures

Bruns, Stefan, Rademacher, Daniel, Vergöhl, Michael, Weiss, Peter

Journal:

Year:

2014

Language:

english

File:

PDF, 468 KB

english, 2014

32

Sauber durch die Sonne

Dr. Michael Vergöhl

Journal:

JOT Journal für Oberflächentechnik

Year:

2012

Language:

german

File:

PDF, 87 KB

german, 2012

33

Herstellung von Polymer- und Polymer-Metalloxid-Kompositschichten

Neubert, Thomas, Vergöhl, Michael

Journal:

Vakuum in Forschung und Praxis

Year:

2013

Language:

german

File:

PDF, 404 KB

german, 2013

34

quantum wells

Jaschinski, O., Vergöhl, M., Schoenes, J., Schlachetzki, A., Bönsch, P.

Journal:

Physical Review B

Year:

1998

Language:

english

File:

PDF, 173 KB

english, 1998

35

Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system

Vergöhl, Michael, Bruns, Stefan, Rademacher, Daniel, Bräuer, Günter

Journal:

Surface and Coatings Technology

Year:

2015

Language:

english

File:

PDF, 1.01 MB

english, 2015

36

SPIE Proceedings [SPIE SPIE Laser Damage - Boulder, Colorado, USA (Sunday 23 September 2012)] Laser-Induced Damage in Optical Materials: 2012 - Applying hafnia mixtures to enhance the laser-induced damage threshold of coatings for third-harmonic generation optics

Mende, Mathias, Jensen, Lars O., Ehlers, Henrik, Bruns, Stefan, Vergöhl, Michael, Burdack, Peer, Ristau, Detlev, Exarhos, Gregory J., Gruzdev, Vitaly E., Menapace, Joseph A., Ristau, Detlev, Soileau,

Year:

2012

Language:

english

File:

PDF, 863 KB

english, 2012

37

SPIE Proceedings [SPIE SPIE Optical Systems Design - Marseille, France (Monday 5 September 2011)] Advances in Optical Thin Films IV - Optical and thin film properties of mixed oxides deposited by pulsed reactive magnetron sputtering

Bruns, Stefan, Vergöhl, Michael, Lequime, Michel, Macleod, H. Angus, Ristau, Detlev

Year:

2011

Language:

english

File:

PDF, 3.11 MB

english, 2011

38

Photocatalytic properties of titania thin films prepared by sputtering versus evaporation and aging of induced oxygen vacancy defects

Henkel, Bodo, Neubert, Thomas, Zabel, Sebastian, Lamprecht, Constanze, Selhuber-Unkel, Christine, Rätzke, Klaus, Strunskus, Thomas, Vergöhl, Michael, Faupel, Franz

Journal:

Applied Catalysis B: Environmental

Year:

2016

Language:

english

File:

PDF, 2.45 MB

english, 2016

39

Optical properties of silicon titanium oxide mixtures prepared by metallic mode reactive sputtering

D. Rademacher, G. Bräuer, B. Fritz, M. Vergöhl

Year:

2012

Language:

english

File:

PDF, 533 KB

english, 2012

40

Origin of particles during reactive sputtering of oxides using planar and cylindrical magnetrons

D. Rademacher, B. Fritz, M. Vergöhl

Year:

2012

Language:

english

File:

PDF, 961 KB

english, 2012

41

Highly insulating alumina films by a bipolar reactive MF sputtering process with special arc handling

Carreri, F.C., Bandorf, R., Gerdes, H., Vergöhl, M., Bräuer, G.

Journal:

Surface and Coatings Technology

Year:

2015

Language:

english

File:

PDF, 1.12 MB

english, 2015

42

Deposition of abrasion resistant single films and antireflective coatings on sapphire

Bruns, S., Vergöhl, M., Zickenrott, T., Bräuer, G.

Journal:

Surface and Coatings Technology

Year:

2015

Language:

english

File:

PDF, 1.12 MB

english, 2015

43

SPIE Proceedings [SPIE Optical Systems Design 2005 - Jena, Germany (Monday 12 September 2005)] Advances in Optical Thin Films II - Temperature dependence of the optical properties of mixed oxide thin films deposited by reactive magnetron sputtering

Vergöhl, M., Hunsche, B., Ritz, A., Amra, Claude, Kaiser, Norbert, Macleod, H. Angus

Year:

2005

Language:

english

File:

PDF, 299 KB

english, 2005

44

HIPIMS ITO films from a rotating cylindrical cathode

Carreri, F.C., Sabelfeld, A., Gerdes, H., Bandorf, R., Vergöhl, M., Bräuer, G.

Journal:

Surface and Coatings Technology

Year:

2015

Language:

english

File:

PDF, 3.64 MB

english, 2015

45

SPIE Proceedings [SPIE SPIE Optical Systems Design - Jena, Germany (Monday 7 September 2015)] Optical Systems Design 2015: Advances in Optical Thin Films V - Recent developments in precision optical coatings prepared by cylindrical magnetron sputtering

Lequime, Michel, Macleod, H. Angus, Ristau, Detlev, Bruns, Stefan, Vergöhl, Michael, Zickenrott, Tobias

Year:

2015

Language:

english

File:

PDF, 236 KB

english, 2015

46

Haftfeste Direktmetallisierung von Kunststoffen durch Beschichtung mit Ionen

Bandorf, Ralf, Waschke, Stefan, Vergöhl, Michael, Grundmeier, Guido, Bräuer, Günter

Journal:

Vakuum in Forschung und Praxis

Year:

2015

Language:

german

File:

PDF, 376 KB

german, 2015

47

SPIE Proceedings [SPIE SPIE Optical Systems Design - Marseille, France (Monday 5 September 2011)] Advances in Optical Thin Films IV - Organic materials for the use in optical layer systems

Neubert, T., Lequime, Michel, Macleod, H. Angus, Gaida, A., Huwer, W., Ristau, Detlev, Vergöhl, M.

Year:

2011

Language:

english

File:

PDF, 868 KB

english, 2011

48

SPIE Proceedings [SPIE SPIE Optical Systems Design - Marseille, France (Monday 5 September 2011)] Advances in Optical Thin Films IV - New sputtering concept for optical precision coatings

Rademacher, Daniel, Lequime, Michel, Macleod, H. Angus, Bräuer, Günter, Vergöhl, Michael, Ristau, Detlev, Fritz, Benjamin, Zickenrott, Tobias

Year:

2011

Language:

english

File:

PDF, 2.40 MB

english, 2011

49

Electrochromic properties of mixed oxides based on titanium and niobium for smart window applications

Ulrich, Stephan, Szyszko, Christian, Jung, Sebastian, Vergöhl, Michael

Journal:

Surface and Coatings Technology

Year:

2017

Language:

english

File:

PDF, 1.70 MB

english, 2017

50

Optical grade SiO 2 films prepared by HWCVD

Sittinger, V., Höfer, M., Harig, T., Justianto, M., Thiem, H., Vergöhl, M., Schäfer, L.

Journal:

Surface and Coatings Technology

Year:

2017

Language:

english

File:

PDF, 1.01 MB

english, 2017